MECE 6334 Modeling MEMS and NEMS
This course covers modeling and analysis of microelectromechanical and nanoelectromechanical systems. Topics include: introduction; continuum mechanics: hear conduction, elasticity, linear thermo elasticity, fluid dynamics, electromagnetism, numerical methods; scaling; thermally driven systems; modeling elastic structures; beans, membranes, plates; modeling coupled thermal-elastic systems; modeling electrostatic-elastic systems: membranes, beams, plates; modeling magnetically actuated systems: micro fluidics; and nonlinear dynamics of MEMS and NEMS.
Prerequisite
Graduate standing in engineering.
Offered
As scheduled