ELEE 6333 Introduction to Micro-Electro-Mechanical Systems (MEMS)
“Electrokinetics” refers to the study of electrically driven mechanical motion of charged particles or fluids. Electrokinetics is a branch of MEMS technology. MEMS is a rapidly growing field that builds on the existing silicon processing infrastructure to create micron-scale devices. Unlike conventional integrated circuits, these devices can have many functions, including sensing, actuation, and communication. Just like microelectronics, MEMS technology will permeate our everyday lives in the coming decades. This course is an introduction to this exciting new field. The course will cover a wide range of topics, including: MEMS, electrokinetics, microsensors and actuators, microfabrication processes, mechanical and electrical characteristics, microfluidics devices and applications.
Offered
As Scheduled