MSEN 8308 Micro and Nanolithography Manufacturing

An advanced course including the physical aspects of nano-lithography. Principles and instrumentation of major lithography technologies for micro/nanofabrication of devices and materials. Advanced photolithography, electron beam lithography, nanoimprint lithography, x-ray lithography, ion beam lithography, soft lithography, and scanning probe lithography. Polymer technology and chemistry of various resist platforms including novolac, styrene, and acrylate systems will be covered. An interesting aspect about the applications in nanoelectronics and biomaterials.



Schedule Type


Grading Basis

Standard Letter (A-F)

Administrative Unit

Mechanical Engineering


As scheduled